Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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All Case Studies
Hankook Tire Technodome Hitachi SU8010 DVIA-MB1000 (P38) vibration environment measurement — 2016.12.28
MB1000 program project P38 handout documenting post-installation vibration environment measurement for a Hitachi SU8010-class SEM at Hankook Tire Technodome, Daejeon (report line: 1st floor research building). Measurement 2016-12-27; report authored 2016-12-28 by DAEIL SYSTEMS field engineers Kim Duhyun (Deputy Manager) and Lim Jongwook (Senior Engineer). VC-Class summary for the slab floor versus the DVIA tabletop, VC-Class Z/X/Y plots, and internal-program Z/X/Y transmissibility plots follow DOCX §2a embed-to-heading mapping; centred masthead raster image1 (title block garnish only) omits publication.
Saeron Technology MB1000 P37 setup result — in-house SEM vibration survey with DVIA-MB1000 (2016-12-22)
Survey report dated 22 December 2016 for MB1000 P37 supporting an in-house SEM at Saeron Technology in Uiwang, Gyeonggi-do (5F). Measurement was performed on 21 December under active DVIA-MB1000 control, comparing floor versus platform vibration before and after SEM operation, with VC-class plots and MB1000 internal-program transmissibility captured for vertical and horizontal axes. The decorative header graphic at the very start of the DOCX is not published.
Tongji University (Shanghai) ZEISS SIGMA 300VP DVIA-MB1000 (MB1000 P28) China business trip worksheet — 2016.11.21
Korean-format China business-trip worksheet for MB1000_P28: target ZEISS SIGMA 300VP SEM, setup and vibration-environment work at Shanghai Tongji University on 16–17 Nov 2016; report dated 2016-11-21 by Deputy Lim Jong-wook. The public page publishes the SEM installation photo after the target-equipment line (DOCX image2, §2a), MB1000 internal-program Z / X / Y captures (image3–5), vibration-environment Z / X / Y plots (image6–8), and ~1M× SEM image comparison PASSIVE vs ACTIVE (image9–10 TIFF→WebP). The approval block raster at the document start (Word image1) is omitted.
Guangzhou ENF Hitachi SEM SU8010 DVIA-MB1000 (MB1000 P35) vibration-environment report — 2016.11.11
Korean-format worksheet for MB1000 program line P35 with target microscope HITACHI SEM SU8010 following active isolator deployment at Guangzhou ENF; trip dated 2016-11-09 and report dated 2016-11-11. The VC-Class summary covers the laboratory floor slab and the isolator tabletop, followed by appended Z-, X-, and Y-axis VC environment plots and a supplementary measurement-program capture.
Saeron Technology UB1000 P3 demo result — in-house SEM vibration survey (2016-10-21)
Demo report dated 21 October 2016 for UB1000 P3 at Saeron Technology in Uiwang, Gyeonggi-do, comparing on-site vibration and 100,000× SEM imaging against the existing MB1000 platform on an in-house SEM. Travelers CHOI HYOUNGMUN and LIM JONG UK; measurer LIM JONG UK. Publication includes the in-house SEM photograph, floor versus platform VC-class Z/X/Y plots, and ACTIVE image-comparison captures for MB1000 and UB1000. Decorative header PNG omitted.
Tier-1 Display Manufacturer Giheung MB1000_P30 TESCAN MIRA3 AMU Vibration Environment Measurement Report (2016-10-12)
MB1000_P30 passive vibration isolation setup at Tier-1 Display Manufacturer Giheung with TESCAN MIRA3 AMU as the target tool: September 28, 2016 floor (BASE) versus platform top (TOP) VC-class summary and Z/X/Y VC curves.