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Installation Report
DVIA-ULF Series
04-15-2026

KIST Olympus BX 51 DVIA-UD350 Installation Report

DVIA-U Series
Installation Report
KIST
Olympus BX 51

Overview

An inspection was performed for the DVIA-U350 installed in KIST room L7222.

With the equipment Turned on/IDLE, inspection and vibration measurements were performed.

Data are presented as VC curves; reference materials on vibration levels are provided.

Vibration isolation system

Model: DVIA-UD350

Serial number: 221004R4

Engineer

DAEIL SYSTEMS field engineer Chaewon Lee

Installation date

April 14, 2026

Report written date

April 15, 2026

Installation site

KIST, room L7222

End User

Korea Institute of Science and Technology

Customer equipment

Manufacturer: Olympus

Equipment: Microscope

Model: BX 51

Equipment specification

N/A

Equipment condition

장비 설치 및 Turned on/IDLE

Vibration measurement instruments

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration measurement setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

During the on-site inspection, no malfunction of the DVIA-UD350 was found.

Approximately one hour was spent on site to verify whether issues would recur; they did not.

No spare parts were replaced; after UI inspection and vibration measurements, the DVIA-UD350 was confirmed to be operating normally.

Measurement data

Measurement siteStateDirectionFloor vibrationDVIA-UD350
한국과학기술연구원 L7222
1. 바닥진동
2. DVIA-UB350
Turned on/IDLEVerticalVC-C @ 16 HzVC-G @ 16 Hz
Left to RightVC-E @ 63 HzVC-G @ 63 Hz
Front to BackVC-E @ 63 HzVC-G @ 63 Hz

Data and images

14-1 UI Image

Horizontal Sensor

Figure 1 X-axis sensor

Vertical Sensor

Figure 3. Z-axis sensor 1

VCM Output

Figure 5. Vertical VCM Output

14-2 Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Installation photo

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

*Notes:*

1. VC-A/B is measured in one-third octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-ULF Series
Date04-15-2026
Tags
DVIA-U Series
Installation Report
KIST
Olympus BX 51