Installation Report

DVIA-ULF Series

12-31-2024

Korea Institute of Science and Technology (L7-222) Olympus BX51 DVIA-UD350 (220127R1-2) Installation Report

DVIA-U Series

Installation Report

KIST

Korea Institute of Science and Technology

Olympus

BX51

Microscope

DVIA-UD350

220127R1-2

Author

Engineers: Chaewon Lee, Jonghwa Seo

Measurement Date

December 23, 2024

Report Written Date

December 31, 2024

Overview

Image fluctuation occurred on the DVIA-UD350 installed at Korea Institute of Science and Technology Building L7, Room 222; inspection and tuning were performed.

After equipment placement, vibration measurement and tuning were performed with the equipment Turned off.

DVIA-UD350 inspection found an anomaly on the Y1 sensor; sensor replacement was performed.

Data are presented as VC curves, and reference material on vibration levels is provided.

Vibration Isolation Platform

Model: DVIA-UD350

Serial Number: 220127R1-2

Engineer

DAEIL SYSTEMS field engineers Chaewon Lee, Jonghwa Seo

Installation Site

Korea Institute of Science and Technology L7, Room 222

End User

Korea Institute of Science and Technology L7, Room 222

Customer Equipment

Manufacturer: Olympus

Equipment: Microscope

Model: BX51

Equipment Vibration Specification

Not supplied by the customer / verification not possible

Equipment Status

장비 설치 및 turned off

Measuring Equipment

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration Measurement Setup

Bandwidth: 200 Hz

Lines: 3200

Averaging: FFT Spectrum Averaging

Engineering Units: m/s

Window: Hanning

Average Mode: Exponential, 40

Conclusion

VC-G, the lowest vibration level in the criterion set, is measured in every direction and across all bands.

Measurement Data

Place of measurement	State	Direction	Floor	DVIA-UD350
Korea Institute of Science and Technology L7, Room 222 1. Floor 2. DVIA-UD350	장비 Turned off	Vertical	VC-C @ 31.5 Hz	VC-G @ 31.5 Hz
		Left to Right	VC-F @ 31.5 Hz	VC-G @ 31.5 Hz
		Front to Back	VC-E @ 1 Hz	VC-G @ 1 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A