Installation Report

DVIA-ULF Series

01-12-2023

KIST Olympus IX51 DVIA-UD350-1008M Installation Report

DVIA-U Series

Installation Report

KIST

Olympus IX51

Overview

The DVIA-UD350 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-UD350-1008M-50t-750H

Serial Number: 221004R1

Engineer

Seounghoon Cheon from DAEIL SYSTEMS

Tuning Date

January 03, 2023

Report written date

January 12, 2023

Date of business trip

17.12.27~17.12.29

End User

KIST (SEOUL)

Location

KIST, SEOUL

Equipment

올림푸스 IX51 현미경

Measurement Device

7.1) Data Physics

Hardware: Quattro, Serial Number: 22436

Software: SignalCalc ACE

7.2) Measurement Setting

Bandwidth: 0 – 80 Hz

Lines: 800

Window: Hanning

Averaging: FFT Spectrum Averaging

Engineering Units: m/s^2

7.3) Sensor

PCB Accelerometer

Model: 393B05

Summary of Vibration Results

Measurement Point	Z-axis (Vertical) 1-10 Hz	Z-axis (Vertical) 12.5-80 Hz	X-axis (Left to Right) 1-10 Hz	X-axis (Left to Right) 12.5-80 Hz	Y-axis (Front to Back) 1-10 Hz	Y-axis (Front to Back) 10-80 Hz
Floor	F	B	G	E	G	E
Active	G	E	G	G	G	G

Data and Image (Equipment Turn off)

Floor Z-axis (Vertical) VC curves

Top Z-axis (Vertical) VC curves

Z-axis (Vertical) Transmissibility

Floor X-axis (Left to Right) VC curves

Top X-axis (Left to Right) VC curves

X-axis (Left to Right) Transmissibility

Floor Y-axis (Front to Back) VC curves

Top Y-axis (Front to Back) VC curves

Y-axis (Front to Back) Transmissibility

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

*Notes:*

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Korea Institute of Science and Technology (L7-222) Olympus BX51 DVIA-UD350 (220127R1-2) Installation Report

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