Installation Report

DVIA-P Series

08-05-2025

Tier-1 Semiconductor Giheung SR1 BRUKER Photomask Repair System RAVE NM-VI DVIA-P4000 Installation Report

DVIA-P Series

Installation Report

Tier-1 Semiconductor

BRUKER

RAVE NM-VI

DVIA-P4000

Overview

Tuning and inspection were conducted on the DVIA-P4000 installed at Tier-1 Semiconductor Giheung site SR1 building due to suspected abnormal operation.

Vibration measurement and tuning were performed with the equipment Turned on/IDLE.

Data are presented as VC curves, along with reference materials for vibration level assessment.

Isolation Platform

Model: DVIA-P4000

Serial Number: 200805R3

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

August 1, 2025

Installation Site

Tier-1 Semiconductor Giheung site SR1 building 2F cleanroom

End User

Tier-1 Semiconductor

Equipment Status

장비설치/IDLE

Customer Equipment

Manufacturer: BRUKER

Equipment: Photomask Repair System

Model: RAVE NM-VI

Vibration specification

Measuring Equipment

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

- PCB Accelerometer

- Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

Meets vibration specifications in all directions.

Measurement Data

Measuring Point	Status	Direction	Floor	DVIA-P4000
Tier-1 Semiconductor Giheung site SR1 building 2F cleanroom 1. Floor vibration 2. DVIA-P4000	장비Turned on/IDLE	Vertical	VC-B @ 63 Hz	VC-E @ 63 Hz
		Left to Right	VC-A @ 63 Hz	VC-G @ 63 Hz
		Front to Back	VC-B @ 63 Hz	VC-F @ 63 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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