YIMO Huahong ASML E-beam Wafer inspection system eScan 460 DVIA-P4000 Installation Report
Contents
Vibration Isolation System Info
Model: DVIA-P4000
Serial Number: 240424R1
Engineer
Chaewon Lee
Tuning Date
September 12, 2024
Installation Site
Huahong
Equipment
Manufacturer: ASML
Equipment: E-beam Wafer inspection system
Model: eScan 460
Equipment Status
The equipment was installed on the DVIA-P4000 platform. Turned off
Number of Tuning Trial
1st
Measurement Device
8.1) Brüel & Kjær LAN-XI DAQ Type 3050
Hardware: B&K Front End Type 3050-A-040
Software: B&K Pulse Labshop 22 Version
8.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Setup
Bandwidth: 200 Hz
Lines: 800
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: Max
Vibration Specification
VC-D
Conclusion
After the installation of the DVIA-P4000, floor vibration was reduced to within the vibration specification in all axes.
Measurement Summary
| Measurement Point | Status | Axis | Vibration Specification | Measurement Data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-P4000 | Floor | DVIA-P4000 | ||||
| FAB 1. Floor 2. DVIA-P4000 | Equipment is installed and turned off. | Vertical | 6.25E-06 m/s (VC-D) | 9.03E-06 m/s @ 6.3 Hz | 1.10E-06 m/s @ 6.3 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | 6.25E-06 m/s (VC-D) | 3.20E-06 m/s @ 2 Hz | 1.23E-06 m/s @ 2 Hz | ✓ PASS | ✓ PASS | ||
| Front to Back | 6.25E-06 m/s (VC-D) | 4.75E-06 m/s @ 5 Hz | 4.61E-07 m/s @ 5 Hz | ✓ PASS | ✓ PASS | ||
Data & Image
Vertical VC Curves
Left to Right VC Curves
Front to Back VC Curves
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
