Installation Report
DVIA-P Series
09-03-2024
YIMO ASML eScan 460 DVIA-P4000 Operation Report
DVIA-P Series
Installation Report
YIMO
ASML
eScan 460
E-beam Wafer inspection system
DVIA-P4000
240424R1
Contents
Customer
YIMO Technology
Engineer
Chaewon Lee
Report Written Date
24.09.03
Vibration Isolation System Info
Model: DVIA-P4000
Serial Number: 240424R1
Installation Site
Wuxi, China
Equipment
Manufacturer: ASML
Equipment: E-beam Wafer inspection system
Model: eScan 460
Equipment Status
The equipment was uninstalled
Vibration Specification
VC-D in all axes
Conclusion
This report is to check whether the DVIA-P is operating normally after the installation.
As a result of checking the sensor data, it is confirmed that it is operating normally.
Data & Image
Top Plate Accelerometer Sensor
Floor Accelerometer Sensor
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Case Study Information
Category
Installation Report
SeriesDVIA-P Series
Date09-03-2024
Tags
DVIA-P Series
Installation Report
YIMO
ASML
eScan 460
E-beam Wafer inspection system
DVIA-P4000
240424R1
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