Huahong ASML eScan 460 DVIA-P4000 Installation Report
Contents
Vibration Isolation System Info
Model: DVIA-P4000
Serial Number: 240424R1
Engineer
Chaewon Lee
Tuning Date
September 12, 2024
Installation Site
Huahong
Equipment
Manufacturer: ASML
Equipment: E-beam Wafer inspection system
Model: eScan 460
Equipment Status
The equipment was installed on the DVIA-P4000 platform. Turned off
Number of Tuning Trial
1st
Measurement Device
8.1) Brüel & Kjær LAN-XI DAQ Type 3050
Hardware: B&K Front End Type 3050-A-040
Software: B&K Pulse Labshop 22 Version
8.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Setup
Bandwidth: 200 Hz
Lines: 800
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: Max
Vibration Specification
VC-D
Conclusion
After the installation of the DVIA-P4000, floor vibration was reduced to within the vibration specification in all axes.
Measurement Summary
| Measurement Point | Status | Axis | Vibration Specification | Measurement Data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-P4000 | Floor | DVIA-P4000 | ||||
| FAB 1. Floor 2. DVIA-P4000 | Equipment is installed and turned off. | Vertical | 6.25E-06 m/s (VC-D) | 9.03E-06 m/s @ 6.3 Hz | 1.10E-06 m/s @ 6.3 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | 3.20E-06 m/s @ 2 Hz | 1.23E-06 m/s @ 2 Hz | ✓ PASS | ✓ PASS | |||
| Front to Back | 4.75E-06 m/s @ 5 Hz | 4.61E-07 m/s @ 5 Hz | ✓ PASS | ✓ PASS | |||
Data & Image
Vertical VC Curves
Vertical Narrow Band
Vertical Transmissibility
Left to Right VC Curves
Left to Right Narrow Band
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Narrow Band
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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