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Installation Report
DVIA-ULF Series
05-26-2026

YIMO DVIA-UD350 (210929R1, P26) OLIMPUS remote tuning worksheet — UD350 internal Z / X / Y program plots

DVIA-U Series
Installation Report
YIMO
OLIMPUS
DVIA-UD350
210929R1
P26
remote tuning

Contents

(UD350_210929R1 P26 Set up)

Site checklist

Target equipmentOLIMPUS
Place of installationN/A
RemarkGood Performance
END USERN/A

Operator and dates

Operator: CHOI, HYOUNGMUN<br>Date of setup : 21.12.15<br>Date of reporting : 21.12.17Date of business trip : 17.12.27~17.12.29

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date: 21.12.15(WEN)

Operator: Daeil System, Research engineer YU, HoSang

Place of measurement : N/A

Equipment Model: OLIMPUS

Measurement conditions and results

Summary of measurement results

Transmissibility

Test Condition2 Hz5 Hz10 Hz
Z-16 dB-25 dB-29 dB
X-5 dB-22 dB-29 dB
Y-11 dB-22 dB-29 dB

Good omnidirectional performance.

UD350 internal program performance measurement result

Z axis

X axis

Y axis

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-ULF Series
Date05-26-2026
Tags
DVIA-U Series
Installation Report
YIMO
OLIMPUS
DVIA-UD350
210929R1
P26
remote tuning

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