Installation Report
DVIA-ULF Series
12-19-2022
XZZJS ZEISS SEM DVIA-U1000 (200828R3) Installation Report — Shanghai
DVIA-U Series
Installation Report
XZZJS
ZEISS
SEM
Shanghai
Xuzhou
DVIA-U1000
200828R3
Contents
XZZJS
XZZJS
(U1000_ 200828R3 Set up)
Site checklist
| Target equipment | ZEISS SEM |
|---|---|
| Place of installation | Shanghai |
| Remark | Good Performance |
| END USER | XZZJS |
Operator and dates
| Operator: Yu, Ho Sang Date of setup : 22.12.13 Date of reporting : 22.12.19 | Date of business trip : 17.12.27~17.12.29 |
|---|
Overview
The DVIA-U1000 active vibration isolation platform is appropriately installed and functioning as intended. Measurement date: 2022.12.13 (Tuesday), Operator: DAEIL SYSTEMS, Hosang Yu Place of measurement: Xuzhou, China Equipment Model: ZEISS SEM
U1000 internal program performance measurement result
Z axis
X axis
Y axis
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Case Study Information
Category
Installation Report
SeriesDVIA-ULF Series
Date12-19-2022
Tags
DVIA-U Series
Installation Report
XZZJS
ZEISS
SEM
Shanghai
Xuzhou
DVIA-U1000
200828R3
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