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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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41 case studies
Pharrics BV MPI Corporation Probe Station MPI TS150 DVIA-T67 (260402R1) Installation Report

Installation report for the DVIA-T67 (serial 260402R1) installed for Pharrics BV in Leuven under an MPI Corporation MPI TS150 probe station. With no vibration specification defined, tuning and vibration measurements were performed with the probe station mounted on the system in the idle state. The results are presented as per-axis Autospectrum and VC Curve plots together with the IEST-RP-CC012.2 vibration criteria reference.

KimTechnix Keyence VK-X4000 Laser Scanning Confocal Microscope DVIA-TD45 (260616R5) Installation Report

Installation report for the DVIA-TD45 (serial 260616R5) installed in the KimTechnix laboratory under a Keyence VK-X4000 laser scanning confocal microscope. Tuning and vibration measurements were performed under three conditions (desk vibration without the isolation platform, passive isolation, and active isolation) with the microscope in the Idle condition, and the final vibration level was measured within the VC-F grade in all axes.

Tier-1 Semiconductor Icheon OLYMPUS Microscope MX63L DVIA-T78 (260819S1) Installation Report

Installation report and demo test for the DVIA-T78 (serial 260819S1) installed in the 1F laboratory of the P&T4 building at a Tier-1 Semiconductor Icheon campus, under an OLYMPUS MX63L microscope. The microscope had no formally defined allowable vibration specification, but image resolution degraded and visible shaking appeared during operation, and the passive isolation table in use was not enough. Two demo tests on the DVIA-T78 and two baseline measurements on the passive table were taken with a B&K Front End Type 3040-A-040 and a PCB 393B05 accelerometer in the IDLE state. On the active platform all three axes settled to the VC-D to VC-E range, and the microscope image shaking and noise disappeared completely. All 24 per-axis Autospectrum and VC Curves plots are published together with the IEST-RP-CC012.2 vibration criteria reference.

Hyundai Motor Keyence Laser Confocal Microscope VK-3000 DVIA-TD45 Installation Report

Hyundai Motor Environmental Technology Research Center Keyence Laser Confocal Microscope VK-3000 DVIA-TD45 installation report — isolator oscillation diagnosed and re-tuned to meet the VC-C requirement; the DVIA-TD45 platform passes on all axes while floor left-to-right fails, with ventilation-duct airflow noted as an additional influence.

Robocube Tech 6-Axis Actuator DVIA-T87 (260423R2) Installation Report

Installation report for the DVIA-T87 (serial 260423R2) supplied to Robocube Tech. After installation in the Robocube Tech assembly room, tuning and vibration measurement were carried out on 17 June 2026 with the unit in the IDLE state. All three axes — vertical (Z), left to right (X) and front to back (Y) — passed on both the floor and the DVIA-T87 top plate, and vibration on the top plate was confirmed to be attenuated relative to the floor on every axis. Per-axis Autospectrum and VC Curves measured with a B&K Front End Type 3050-A-040 and a PCB 393B05 accelerometer are published together with the IEST-RP-CC012.2 vibration criteria reference.

WONIK IPS DVIA-T78 (211213R1) Installation Report
Installation Report
DVIA-T Series
05-26-2026

WONIK IPS DVIA-T78 (211213R1) Installation Report

DVIA-T78 (serial 211213R1) installation report for WONIK IPS Jinwi site, 4F wafer analysis lab. Re-tuning and vibration measurement on December 12, 2025, with Bruker Nano Indentation tester TS77 on the isolator. Overview notes a return visit due to high vibration against Bruker self-test criteria; conclusion confirms good isolator performance in all directions while Bruker cited rubber pillars below the tool and planned equipment modification with headquarters. UI plots: VC curves, autospectra, and transmissibility by axis. Reference publishes the standard VC criteria table.