Vibration Isolation Case Studies

DVIA-P2200 (serial 240705R1) installation report for JEOL JBX-8100FS electron beam lithography at Korea Institute of Nanotechnology 2F Nano Reso/Pattern Support Line. Tuning and vibration measurement on October 29, 2024; engineer Chaewon Lee (DAEIL SYSTEMS). Published figures: equipment photo, equipment vibration specification diagram, vertical/left-to-right/front-to-back VC, narrowband, and transmissibility (Data Physics Software), plus control-unit VC and narrowband plots. Reference uses the Generic Vibration Criteria markdown table only.

DVIA-ML1000 installation report (serial 240709R2) for ZEISS FE-SEM GeminiSEM 460 at Tier-1 Semiconductor Cheonan campus C5 building. Korean handout: tuning and vibration measurement on October 24, 2024; report written October 29, 2024. Equipment condition: 장비 설치 및 IDLE. Brüel & Kjær LAN-XI DAQ and PCB 393B05 accelerometer. Manufacturer equipment vibration specification as embedded figure; UI-program VC, Autospectrum, and Transmissibility by axis; onsite equipment photo; Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).

DVIA-M1000 serial 240724R3 — handout for Suzhou Institute of Nanotechnology, target equipment Omicron STM, installation and measurement in Suzhou. Overview and measurement details match the published form; M1000 internal program performance plots labeled Vertical, Left to Right, and Front to Back from the UI program. Cover-only header graphics are not republished.

DVIA-P4000 (serial 240424R1) installation report for ASML E-beam Wafer inspection system eScan 460 at Huahong. Second tuning trial (1st: 24.09.12); tuning 2024-10-07, report written 2024-10-12. B&K LAN-XI / PCB 393B05. VC-D specification; measurement summary PASS all axes on DVIA-P4000. Published axis VC curves only; Reference uses the Generic Vibration Criteria markdown table.

DVIA-P2200 (serial 230927R5) vibration measurement at Youngwoo DSP Cheonan headquarters factory with upper equipment Turn on. B&K LAN-XI / Pulse LabShop; VC curves and autospectrum/transmissibility plots by axis. Equipment vibration spec undetermined; Reference uses the Generic Vibration Criteria markdown table only.

Tier-1 Semiconductor Fabrication Facility Pyeongtaek P4 3F Bruker nm-VI DVIA-P4000 Installation Report