Vibration Isolation Case Studies

DVIA-ML3000 (serial 250805R2) installation report for the Nano Convergence Technology Institute 4F Line with a ZEISS X-ray Microscope Versa 630. Equipment specification is shown as a diagram; measurement summary compares floor versus DVIA-ML3000 in Turned on/IDLE state. VC, autospectrum, and transmissibility plots per axis; Reference uses the standard Generic Vibration Criteria markdown table.

Tier-1 Semiconductor Fabrication Facility Hwaseong ZEISS AIMS32-193i DVIA-P4000 Installation Report

DVIA-ULF1000 (S/N 250813R2) installation and 6th tuning at Huasheng Lianying Vibration Damping Platform, Wuxi, China, for YIDONG FE-SEM YF-1801. After relocating units under the level feet and re-tuning, vertical / left-to-right / front-to-back VC, autospectrum, and transmissibility plots from the UI program are published with equipment photo. Decorative header image omitted; Reference uses the standard VC criteria table (no EMF upload).

DVIA-ML1000 installation report — Hitachi FE-SEM model SU8600 (serial 250822R5). Overview states the platform is appropriately installed and functioning as intended. Vibration specification N/A; End user and location N/A. Measurement summary compares floor vs on DVIA-ML1000 with SU8600 turned on/IDLE. UI-program VC curves, Autospectrum, and Transmissibility (vertical, left-to-right, front-to-back) and equipment photo.

Partner site — YIDONG YF-1801; DVIA-ML1000 250912R5 (1st). Transmissibility-focused set.

December 2025 tuning report for YIDONG FE-SEM (YF-1801): image instability mitigation, pump-related resonance findings, VC / autospectrum / transmissibility plots on DVIA-ULF1000 (S/N 250813R2), Wuxi.