Vibration Isolation Case Studies

DVIA-T78 (serial 211213R1) installation report for WONIK IPS Jinwi site, 4F wafer analysis lab: tuning and vibration measurement on November 25, 2025, with Bruker Nano Indentation tester TS77 on the isolator. Two vibration measurement rounds (isolator plate vs floor, then instrument floor vibration). Measurement report written November 27, 2025. VC curves with floor vs DVIA traces, autospectra and transmissibility by axis on the isolated stage, followed by VC and autospectrum curves for equipment-floor vibration alone. Measurement tables include floor-vs-isolator pass/fail notation in the Vertical direction.

DVIA-T67 (serial 170718R8) tuning and vibration measurement at Tier-1 Semiconductor Cheongju campus P&T6 4th-floor cleanroom K16 for Olympus 3D Measuring Razer Microscope OLS4100. LNSTECH (엘앤에스텍) customer vs Tier-1 Semiconductor end-user site lines match the Word form. Figures: VC, autospectrum, and transmissibility for vertical, left-to-right, and front-to-back axes; Generic Vibration Criteria as a markdown Reference table only (no EMF artwork). Engineer Chaewon Lee (DAEIL SYSTEMS); measurement November 3, 2025; report written November 11, 2025.

DVIA-T76 (serial 250715R2) inspection report for Mutec Korea 1F cleanroom. Settling-time tuning reduced top-plate response from about 6 s to about 2 s at maximum stage speed; vibration measurement with equipment installed and Turned on/IDLE. Customer tool: Mutec Korea semiconductor inspection equipment model MG. Plots include before/after settling comparison and axis VC curves, autospectra, and transmissibility; Reference publishes the standard VC criteria table.

July 2025 installation report at Seoul Asan Hospital 4th floor: DVIA-T56 (serial 190329R1-3) beneath a Tomocube HT-2H fluorescence holographic tomography microscope. Published VC, autospectrum, and transmissibility plots by axis; Reference uses the standard VC criteria table.

DVIA-T67 (serial 250204R2) tuning and vibration measurement at Korea Institute of Nano Technology 3F QRT lab for customer QRT, May 13, 2025. MSTech MST8500 probe station; equipment installed and Operation during measurement; overall isolator performance tuning (not probing-environment-specific). Floor VC-C/B/C reduced to VC-F/F/G by axis; VC curves, autospectra, transmissibility, and equipment photo published; Reference as markdown table.

DVIA-T67 (serial 250204R2) tuning and vibration measurement at Korea Institute of Nano Technology 3F QRT lab for customer QRT, with MSTech MST8500 probe station. Equipment installed and Operation during reported work; probing-optimized tuning; VC / Autospectrum / Transmissibility plots by axis; equipment photo; measurement summary table; Reference as markdown Generic Vibration Criteria table.