Installation Report

DVIA-ML Series

04-08-2025

Jeonbuk National University Raith Voyager DVIA-ML3000 Installation Report

DVIA-ML Series

Installation Report

Raith

Voyager

Jeonbuk National University

Overview

Tuning and vibration measurements were conducted on the DVIA-ML3000 system installed at Semiconductor Physics Research Center, Jeonju Campus, Jeonbuk National University.

Tuning and vibration measurements were performed with the equipment in idle condition.

The collected data was analyzed and presented as a VC Curve, providing reference information on the vibration levels.

Vibration Isolation System Information

Model: DVIA-ML3000

Serial Number: 250313R2

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

April 08, 2025

End User

Jeonbuk National University

Location

Cleanroom (1st Floor), Semiconductor Physics Research Center, Jeonju Campus, Jeonbuk National University

Equipment Condition

Turned on/IDLE

Equipment

Manufacturer: Raith

Equipment: Electron Beam Lithography system

Model: Voyager

Measurement Device

9.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

9.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measurement Setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Vibration Spec

Conclusion

The equipment complies with the specifications across all axes

Summary of Vibration Results

	Measurement Point	Status	Vibration Specification (µm/s)	Axis		Measurement Data
	Measurement Point	Status	Vibration Specification (µm/s)	Floor	DVIA-ML3000	Floor	DVIA-ML3000
Cleanroom (1st Floor), Semiconductor Physics Research Center, Jeonbuk National University 1. Floor 2. DVIA-ML3000	Turned on/IDLE	Between 1.6-16 Hz: less than 0.8um/s Above 16 Hz : less than 1.0um/s	Vertical	VC-F @ 31.5 Hz	VC-G @ 31.5 Hz	✗ FAIL	✓ PASS
			Left to Right	VC-G @ 63 Hz	VC-G @ 63 Hz	✓ PASS	✓ PASS
			Front to Back	VC-G @ 63 Hz	VC-G @ 63 Hz	✓ PASS	✓ PASS

Data & Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment photo

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A