POSTECH Raith Voyager Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-ML3000 installed at the Nano Convergence Technology Institute of POSTECH (Pohang University of Science and Technology).
There was significant HVAC/ventilation airflow around the vibration isolation table, which may have affected the tuning and vibration measurement.
Although the equipment was in IDLE state, some parts were in operation, which may have affected the tuning and vibration measurement.
The data is presented as VC curves, and reference data on vibration levels is provided.
Vibration Isolation System Information
Model: DVIA-ML3000
Serial Number: 250103R2-1
Engineer
Chaewon Lee from DAEIL SYSTEMS
Measurement date: 25.05.23
Report written date: 25.05.26
Tuning Date
May 23, 2025
End User
Pohang University of Science and Technology
Installation Site
Nano Convergence Technology Institute, Room 216, Pohang University of Science and Technology
Equipment
Manufacturer: Raith
Equipment: Electron Beam Lithography system
Model: Voyager
Specification
Equipment Condition
The equipment is installed / IDLE
Measuring Equipment
Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
Accelerometer: PCB 393B05
Measurment Set-up
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
The performance satisfies the vibration specification.
Measurment Data
| Measurment Point | Status | Specification | AXIS | Measurement Data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-ML3000 | Floor | DVIA-ML3000 | ||||
| Pohang University of Science and Technology Nano Convergence Technology Institute 1. Floor 2. DVIA-ML3000 | Equipment installation / IDLE | 0.8 um/s@ 1.6 - 16 Hz 1.0 um/s@ over 16 Hz | Vertical | VC-C @ 50 Hz | VC-G @ 50 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-E @ 63 Hz | VC-G @ 63 Hz | ✗ FAIL | ✓ PASS | |||
| Front to Back | VC-B @ 10 Hz | VC-G @ 10 Hz | ✗ FAIL | ✓ PASS | |||
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Equipment Picture
Reference
Generic Vibration Criteria
*Notes:*
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
