Installation Report

DVIA-ULF Series

11-30-2022

Tier-1 Semiconductor Icheon Hitachi FE SEM DVIA-UB1000 Installation Report

DVIA-U Series

Installation Report

Tier-1 Semiconductor

Icheon

Hitachi

FE SEM

DVIA-UB1000

180305R3

Prepared for

Tier-1 Semiconductor

Prepared by

Engineer: Seounghoon Cheon

Tuning date: 22.11.29

Report written date: 22.11.30

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-UB700 active vibration isolation platform is appropriately installed and functioning as intended.

System Information

Model: DVIA-UB1000

Serial Number: 180305R3

Engineer

Seounghoon Cheon, from DAEIL SYSTEMS

Tuning Date

November 29, 2022

Location

Tier-1 Semiconductor, icheon-si

Equipment

Hitachi FE SEM Equipment

Measurement Device

7.1) Data Physics

Hardware: Quattro, Serial Number: 22436

Software: SignalCalc ACE

7.2) Measurement Setting

-Bandwidth: 0 – 80 Hz

-Lines: 800

-Window: Hanning

-Averaging: FFT Spectrum Averaging

-Engineering Units: m/s^2

7.3) Sensor

PCB Accelerometer

Model: 393B05

Summary of Vibration Results

Measurement Point	Z-axis (Vertical) 1-10 Hz	Z-axis (Vertical) 12.5-80 Hz	X-axis (Left to Right) 1-10 Hz	X-axis (Left to Right) 12.5-80 Hz	Y-axis (Front to Back) 1-10 Hz	Y-axis (Front to Back) 10-80 Hz
Floor	C	B	C	B	C	B
Active	F	E	E	E	E	E

Data and Image (Equipment Turn off)

Floor Z-axis (Vertical) VC curves

Active Z-axis (Vertical) VC curves

Z-axis (Vertical) Transmissibility

Floor X-axis (Left to Right) VC curves

Active X-axis (Left to Right) VC curves

X-axis (Left to Right) Transmissibility

Floor Y-axis (Front to Back) VC curves

Active Y-axis (Front to Back) VC curves

Y-axis (Front to Back) Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A