Thermofisher Scientific PRISMA E SEM DVIA-MB1000 Installation Report

Installation Report

DVIA-M Series

Thermo Fisher Scientific

Overview

The DVIA-MB1000 active vibration isolation platform is appropriately installed and functioning as intended for Thermofisher Scientific PRISMA E SEM.

1. Measurement Details

Measurement Date: February 11, 2019

Measurement Devices:

LAN-XI Data Acquisition Hardware – Brüel & Kjær 3050-A-040 (Serial Number: 3050-111438)

Data Analysis Software – Brüel & Kjær PULSE LAB SHOP 22

Sensors – PCB Accelerometer Model: 393B05 (Serial Number: 48995, 40626)

Measurement Location: 4th Floor

Measurement Setup:

Bandwidth: 0 – 100 Hz

Lines: 400

Window: Hanning

Averaging: Fast Fourier Transform Spectrum Averaging

Amplitude Units: m/s²

Spectral Unit: RMS

2. Equipment Information

Manufacturer: Thermofisher Scientific

Model: PRISMA E SEM

Floor Vibration Specification: VC-E in Vertical and Horizontal Axis

3. Vibration Isolation System Information

Model: DVIA-MB1000

Image 1 — Thermofisher Scientific PRISMA E SEM DVIA-MB1000 Installation Report

4. Summary

Item	Z axis (Vertical)	X axis (Left to Right)	Y axis (Front to Back)
Frequency Range	1 - 80 Hz	1 - 80 Hz	1 - 80 Hz
Floor Vibration Specification	VC-E	VC-E	VC-E
Floor Vibration	✗ Fail	✗ Fail	✗ Fail
Vibration on AVI	✓ Pass	✓ Pass	✓ Pass

5. Results – Vibration Criterion Curves

VC Curves, Z-axis (Vertical)

Image 2 — Thermofisher Scientific PRISMA E SEM DVIA-MB1000 Installation Report

The measured vertical floor vibration did not meet the vibration specification VC-E. The active vibration isolation system reduced the vertical floor vibration from VC-A to VC-E.

VC Curves, X-axis (Left to Right)

Image 3 — Thermofisher Scientific PRISMA E SEM DVIA-MB1000 Installation Report

The measured X-axis floor vibration did not meet the floor vibration specification VC-B. The active vibration isolation system reduced the X-axis floor vibration from VC-B to VC-F.

VC Curves, Y-axis (Front to Back)

Image 4 — Thermofisher Scientific PRISMA E SEM DVIA-MB1000 Installation Report

The measured Y-axis floor vibration did not meet the floor vibration specification VC-C. The active vibration isolation system reduced the Y-axis floor vibration from VC-C to VC-G.

6. Results – Active Isolation Off vs Active Isolation On

Image 5 — Thermofisher Scientific PRISMA E SEM DVIA-MB1000 Installation Report

Image 6 — Thermofisher Scientific PRISMA E SEM DVIA-MB1000 Installation Report

HV: 15.00 kV / Mag: 50,000x / Linewidth: 1 μm

Image 7 — Thermofisher Scientific PRISMA E SEM DVIA-MB1000 Installation Report

Image 8 — Thermofisher Scientific PRISMA E SEM DVIA-MB1000 Installation Report

HV: 15.00 kV / Mag: 50,000x / Linewidth: 1 μm

7. Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A