COXEM FX-2000 Schottky FE-SEM DVIA-ULFB700 (260423R1-2) Installation Report
Contents
Overview
Tuning and vibration measurement were conducted on the DVIA-ULFB700 installed at COXEM, Migun Techno World Building 1, 2nd floor, Yuseong-gu, Daejeon.
Tuning and vibration measurement were performed with the equipment in Turned on/IDLE state.
This report was prepared for internal use.
Vibration isolation platform
Model: DVIA-ULF700
Serial Number: 260423R1-2
Engineer
DAEIL SYSTEMS field engineers Chaewon Lee, Kim Joohyuk
Tuning date
May 21, 2026
Installation site
COXEM, Migun Techno World Building 1, 2nd floor, Yuseong-gu, Daejeon
End User
COXEM
Customer equipment
Manufacturer: COSEM
Equipment: Schottky Field Emission SEM
Model: FX-2000
Equipment specification
-VC E
Equipment status
장비 설치 및 Turned on/IDLE
Conclusion
Passive
From 10 Hz and above, floor vibration is attenuated, indicating good performance.
Active
Performance is satisfied in all directions.
Measurement data
12-1) Passive
| Measurement site | State | Vibration specification | Direction | Floor vibration | DVIA-ULFB700 |
|---|---|---|---|---|---|
| COXEM 1. Floor vibration 2. DVIA-ULFB700 | Turned on/IDLE | VC-E | Vertical | VC-C | VC-C |
| Left to Right | VC-D | VC-E | |||
| Front to Back | VC-G | VC-G | |||
| Measurement site | State | Vibration specification | Direction | Floor vibration | DVIA-ULFB700 |
| COXEM 1. Floor vibration 2. DVIA-ULFB700 | Turned on/IDLE | VC-E | Vertical | VC-C @ 12.5 Hz | VC-F @ 12.5 Hz |
| Left to Right | VC-D @ 1.6 Hz | VC-F @ 1.6 Hz | |||
| Front to Back | VC-E @ 10 Hz | VC-F @ 10 Hz |
12-3) Data Obtained Via UI Program
| Measurement site | State | Direction | Floor vibration | DVIA- ULFB700 |
|---|---|---|---|---|
| COXEM 1. Floor vibration 2. DVIA- ULFB700 | Turned on/IDLE | Vertical | VC-B @ 1.6 Hz | VC-G @ 1.6 Hz |
| Left to Right | VC-E @ 12.5 Hz | VC-G @ 12.5 Hz | ||
| Front to Back | VC-E @ 2 Hz | VC-G @ 2 Hz |
Data and image
12-1) Passive
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospecturm
Front to Back Transmissibility
12-2) Active
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospecturm
Front to Back Transmissibility
12-3) Data Obtained Via UI Program
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospecturm
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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