Installation Report

DVIA-ULF Series

03-13-2026

TESCAN Korea Mira XR FE-SEM DVIA-ULFB700 (260212R2-2) Installation Report — 2026.03.13

DVIA-ULF Series

Installation Report

TESCAN Korea

Mira XR

FE-SEM

DVIA-ULFB700

260212R2-2

Rue West City

Customer

TESCAN Korea

Engineer

Chaewon Lee, DAEIL SYSTEMS field engineer

Installation date

March 12, 2026

Measurement date

March 12, 2026

Report written date

March 13, 2026

Overview

Tuning and vibration measurement were performed for the DVIA-ULFB700 installed at the TESCAN Korea Demo Room, Rue West City Building B 2F.

Tuning and vibration measurement were carried out with the equipment turned on/in IDLE state.

At the time of tuning and vibration measurement, the cooling fan mounted on the Tescan Mira XR tool was operating on top of the isolation platform. This may affect tuning and vibration measurement.

Data are presented as VC curves, and reference materials on vibration levels are provided.

Vibration Isolation System Information

Model: DVIA-ULFB700

Serial Number: 260212R2-2

Installation Site

Rue West City Building B 2F, TESCAN Korea Demo Room

End User

TESCAN Korea

Customer Equipment

Manufacturer: TESCAN

Equipment: FE-SEM

Model: Mira XR

Equipment specification

up to 30 Hz: 6 um/s

above 30 Hz: 12 um/s

Equipment Status

장비 설치 및 Turned on/IDLE

Measuring equipment

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measurement setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Due to the cooling fan installed on the vibration isolation platform, some frequency ranges show higher vibration on the DVIA-ULFB700 than on the floor. This is equipment vibration being measured, not a fault of the isolation platform.

The vibration specification is met in all directions.

Measurement Summary

Measurement site	State	Vibration specification	Direction	Meas. value — Floor vibration	Meas. value — DVIA-ULFB700	Result — Floor vibration	Result — DVIA-ULFB700
Rue West City Building B 2F, TESCAN Korea Demo Room · 1. Floor vibration · 2. DVIA-ULFB700	Turned on/IDLE	up to 30 Hz: 6 um/s above 30 Hz: 12 um/s	Vertical	VC-E @ 4 Hz	VC-G @ 4 Hz	✓ PASS	✓ PASS
			Left to Right	VC-E @ 1 Hz	VC-F @ 1 Hz	✓ PASS	✓ PASS
			Front to Back	VC-F @ 3.15 Hz	VC-G @ 3.15 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A