Installation Report

DVIA-ULF Series

04-24-2026

Zhejiang Chuanghao Hitachi SU5000 FE-SEM DVIA-ULFB700 Installation Report

DVIA-ULF Series

Installation Report

Zhejiang Chuanghao

Hitachi

SU5000

FE-SEM

DVIA-ULFB700

Overview

The DVIA-ULFB700 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-ULFB700

Serial Number: 260112R4

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

April 23, 2026

End User

Zhejiang Chuanghao Semiconductor Co., Ltd

Number of Tuning Trial

1st

Location

Yiwu, China

Equipment

Manufacturer: Hitachi

Equipment: FE-SEM

Model: SU5000

Vibration Specification

Fequency	Horizontal	Vertical
2.0 Hz	2.0 μm p-p max	5.0 μm p-p max
3.0 Hz	1.5 μm p-p max	5.0 μm p-p max
5.0 Hz	1.5 μm p-p max	2.0 μm p-p max
8.0 Hz	1.2 μm p-p max	1.0 μm p-p max
Hz	1.0 μm p-p max	1.5 μm p-p max

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

Measurement Summary

Measurement Point	Status	Axis	Vibration specification	Floor (measurement)	DVIA-ULFB700 (measurement)	Floor (result)	DVIA-ULFB700 (result)
1.Floor 2.DVIA-ULFB700	Equipment is Turned on/IDLE	Vertical	Refer to item 9	VC-C @ 12.5 Hz	VC-G @ 12.5 Hz	✓ PASS	✓ PASS
		Left to Right		VC-E @ 12.5 Hz	VC-G @ 12.5 Hz	✓ PASS	✓ PASS
		Front to Back		VC-B @ 100 Hz	VC-G @ 100 Hz	✓ PASS	✓ PASS

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Equipment photograph

Equipment diagram

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (μin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A