Hitachi SU8600 FE-SEM DVIA-ML1000 Installation Report (2025-12-01)

DVIA-M Series

Installation Report

Hitachi

SU8600

FE-SEM

DVIA-ML1000

Overview

The DVIA-ML1000 active isolation platform is installed and operating as intended . Hitachi SU8600 FE-SEM, serial 250912R6, 1st tuning trial.

Equipment condition : installed / Turned off for the reported session.

Model: DVIA-ML1000

Serial number: 250912R6

Chaewon Lee — DAEIL SYSTEMS

December 1, 2025

December 5, 2025

Manufacturer: Hitachi

Equipment: FE-SEM

Model: SU8600

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Site policy: photo not allowed on site; no equipment photo in this package.

- Generic vibration criteria: shared Reference block below.

Generic Vibration Criteria

Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A