Huahong Dongfang Jingyuan SEpA_i515 DVIA-P7000 Installation Report

DVIA-P Series

Installation Report

Huahong

Dongfang Jingyuan

SEpA_i515

E-beam Wafer inspection system

DVIA-P7000

250131R4

Vibration Isolation System Info

Model: DVIA-P7000

Serial Number: 250131R4

Engineer

Chaewon Lee

Tuning Date

July 25, 2025

Installation Site

Huahong FAB 9

Equipment

Manufacturer: Dongfang Jingyuan Electron Limited

Equipment: E-beam Wafer inspection system

Model: SEpA_i515

Equipment Status

The equipment was installed on the DVIA-P7000 platform. IDLE

Number of Tuning Trial

1st

Measurement Device

8.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

8.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measurement Setup

Bandwidth: 200 Hz

Lines: 3200

Averaging: Spectrum Averaging

Engineering Units: m/s

Window: Hanning

Overlap: Max

Vibration Specification

VC-D

Conclusion

After the installation of the DVIA-P7000, floor vibration was reduced to within the vibration specification in all axes.

Measurement Summary

Measurement Point	Status	Axis	Vibration Specification	Measurement Data		Result
Measurement Point	Status	Axis	Vibration Specification	Floor	DVIA-P7000	Floor	DVIA-P7000
Huahong FAB 9 1. Floor 2. DVIA-P7000	Equipment is installed and is in IDLE.	Vertical	VC-D	VC-C @ 50 Hz	VC-E @ 50 Hz	✗ FAIL	✓ PASS
		Left to Right		VC-D @ 80 Hz	VC-G @ 80 Hz	✓ PASS	✓ PASS
		Front to Back		VC-C @ 4 Hz	VC-F @ 4 Hz	✗ FAIL	✓ PASS

Data & Image

Vertical VC Curves

Left to Right VC Curves

Front to Back VC Curves

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A