Skip to main content
Installation Report
DVIA-M Series
11-28-2024

YIMO Shenzhen Weiguang Thermo Fisher Scientific Helios G5 FIB-SEM DVIA-M1000 (240415R3-3) Installation Report

DVIA-M Series
Installation Report
YIMO
Shenzhen Weiguang
Thermo Fisher Scientific
Helios G5
FIB-SEM
Shenzhen
DVIA-M1000
240415R3-3

Contents

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-M1000

Serial Number: 240415R3-3

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

November 27, 2024

Report written date

November 28, 2024

Prepared for

Shenzhen Weiguang

Number of Tuning Trial

1st

Location

Shenzhen, China

Equipment

Manufacturer: Thermo Fisher Scientific

Equipment: FIB-SEM

Model: Helios G5

Equipment Condition

The equipment is installed/IDLE

Tuning Request

9. Data and Image

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

10. Equipment

11. Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date11-28-2024
Tags
DVIA-M Series
Installation Report
YIMO
Shenzhen Weiguang
Thermo Fisher Scientific
Helios G5
FIB-SEM
Shenzhen
DVIA-M1000
240415R3-3

Related Case Studies

YIMO Shenzhen Weiguang Thermo Fisher Scientific Cryo FIB-SEM Aquilos DVIA-M1000 (240507R6) Installation Report
DVIA-M Series

YIMO Shenzhen Weiguang Thermo Fisher Scientific Cryo FIB-SEM Aquilos DVIA-M1000 (240507R6) Installation Report

08-07-2024Read more
Peking University Shenzhen Graduate School Thermo Fisher Helios 5 CX FIB-SEM DVIA-M1000 (250613R3) Installation Report
DVIA-M Series

Peking University Shenzhen Graduate School Thermo Fisher Helios 5 CX FIB-SEM DVIA-M1000 (250613R3) Installation Report

11-11-2025Read more
Chinese Academy of Sciences Institute of Semiconductors Thermo Fisher Helios 5 CX DVIA-M1000 (250619R4) Installation Report
DVIA-M Series

Chinese Academy of Sciences Institute of Semiconductors Thermo Fisher Helios 5 CX DVIA-M1000 (250619R4) Installation Report

09-01-2025Read more