YIMO Zeiss Technology (Suzhou) ZEISS EVO 10 SEM DVIA-M1000 (240304R8) Installation Report

DVIA-M Series

Installation Report

YIMO

ZEISS

SEM

EVO 10

Suzhou

DVIA-M1000

DVIA-ML1000

240304R8

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-M1000

Serial Number: 240304R8

Chaewon Lee DAEIL SYSTEMS

November 06, 2025

November 11, 2025

Zeiss Technology (Suzhou) Co., Ltd

3rd

Suzhou, China

Manufacturer: ZEISS

Equipment: SEM

Model: EVO 10

The equipment is Turned on/IDLE

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A