ZEISS Sigma 300VP DVIA-MB1000 Installation Report (SN 160706R1, 2026-01-07)

DVIA-M Series

Installation Report

ZEISS

Sigma 300VP

DVIA-MB1000

FE-SEM

160706R1

Overview

The DVIA-MB1000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-MB1000

Serial Number: 160706R1

Chaewon Lee DAEIL SYSTEMS

December 24, 2025

26.01.07

N/A

2nd

N/A

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma 300VP

The equipment is installed/IDLE

N/A

Generic Vibration Criteria

Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A